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OFHC copper substrates for niobium sputtering: comparison of chemical etching recipes

Published Online: 2020-01-31

Published Print: 2020-06

Authors

Yang, Fuyu

Zhang, Pei https://orcid.org/0000-0002-2673-5481
Dai, Jin

Li, Zhongquan
Funding

Funding for this research was provided by:

Hunderd-Talent Program of Chinese Academy of Sciences

Platform for Advanced Photon Source Technology
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Text and Data Mining valid from 2020-01-31

Version of Record valid from 2020-01-31
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Article History

Received: 22 December 2019

Revised: 8 January 2020

Accepted: 22 January 2020

First Online: 31 January 2020

Document is current