Two-dimensional particle-in-cell simulation parallelized with graphics processing units for the investigation of plasma kinetics in a dual-frequency capacitively coupled plasma
Crossref DOI link: https://doi.org/10.1007/s41614-022-00092-2
Published Online: 2022-09-28
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shin, Ji Hyun
Kim, Hwanho
Lee, Hae June https://orcid.org/0000-0003-3401-3355
Funding for this research was provided by:
Pusan National University (2-Year Research Grant)
Text and Data Mining valid from 2022-09-28
Version of Record valid from 2022-09-28
Article History
Received: 9 May 2022
Accepted: 6 September 2022
First Online: 28 September 2022