Design, simulation and fabrication of piezoresistive microcantilevers using standard multi user MEMS process
Crossref DOI link: https://doi.org/10.1007/s41683-017-0008-9
Published Online: 2017-05-17
Published Print: 2017-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Girija, K. G.
Tushir, Indu
Vatsa, R. K.
Topkar, Anita
License valid from 2017-05-17