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Fabrication, process optimization and electrical characterization of thermopile based CMOS-MEMS flow sensors in 180 nm CMOS technology

Crossref DOI link: https://doi.org/10.1007/s41683-024-00129-3

Published Online: 2024-12-04

Published Print: 2024-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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