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Fabrication of Nanopatterns on Silicon Surface by Combining AFM-Based Scratching and RIE Methods

Crossref DOI link: https://doi.org/10.1007/s41871-018-0024-9

Published Online: 2018-10-11

Published Print: 2018-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Geng, Yanquan

Yan, Yongda https://orcid.org/0000-0002-9290-5362
Wang, Jiqiang

Zhuang, Yun
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51705104)

National Natural Science Foundation of China (51675134)

Foundation for Innovative Research Groups of the National Natural Science Foundation of China (51521003)

Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education (2017KM005)

China Postdoctoral Science Foundation (2017M610206)

China Postdoctoral Science Foundation (2018T110289)
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Article History

Received: 22 June 2018

Revised: 24 August 2018

Accepted: 29 September 2018

First Online: 11 October 2018