Michihata, Masaki http://orcid.org/0000-0002-2373-6534
Zheng, Zhao
Funaiwa, Daiki
Murakami, Sojiro
Kadoya, Shotaro
Takahashi, Satoru
Funding for this research was provided by:
Japan Society for the Promotion of Science (18K18803)
Japan Society for the Promotion of Science (20H02040)
Adaptable and Seamless Technology Transfer Program through Target-Driven R and D (VP30118066192)
Article History
Received: 18 September 2020
Revised: 12 October 2020
Accepted: 23 October 2020
First Online: 13 January 2021
Change Date: 23 November 2022
Change Type: Correction
Change Details: A Correction to this paper has been published:
Change Details: https://doi.org/10.1007/s41871-022-00156-4
Conflict of interest
: Satoru Takahashi is an editorial board member for “Nanomanfucturing and Metrology” and was not involved in the editorial review, or the decision to publish this article. All authors declare that there are no competing interests.