Schienbein, Ralf http://orcid.org/0000-0002-8052-5813
Fern, Florian
Theska, René http://orcid.org/0000-0003-0589-8270
Supreeti, Shraddha
Füßl, Roland
Manske, Eberhard http://orcid.org/0000-0002-1672-2978
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (GRK 2182)
Technische Universität Ilmenau
Article History
Received: 21 December 2020
Revised: 15 February 2021
Accepted: 25 February 2021
First Online: 20 April 2021
Change Date: 13 December 2022
Change Type: Correction
Change Details: A Correction to this paper has been published:
Change Details: https://doi.org/10.1007/s41871-022-00162-6
Conflict of interest
: Eberhard Manske is an editorial board member for “Nanomanfucturing and Metrology” and was not involved in the editorial review, or the decision to publish this article. All authors declare that there are no competing interests.