Funding for this research was provided by:
Physikalisch-Technische Bundesanstalt (PTB)
Article History
Received: 3 November 2021
Revised: 5 January 2022
Accepted: 7 January 2022
First Online: 3 February 2022
Change Date: 24 November 2022
Change Type: Correction
Change Details: A Correction to this paper has been published:
Change Details: https://doi.org/10.1007/s41871-022-00165-3
Conflict of interest
: Gaoliang Dai is an editorial board member for “Nanomanfucturing and Metrology” and was not involved in the editorial review, or the decision to publish, this article. All authors declare that there are no competing interests.