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Effect of Refresh Time on XeF2 Gas-assisted FIB Milling of GaAs

Published Online: 2023-08-08

Published Print: 2023-12

Authors

Sun, Jining

Zhang, Lei

Zhang, Yi

Han, Yunlong

Zhang, Lei https://orcid.org/0000-0003-4975-6821
Funding

Funding for this research was provided by:

Startup funding support by the Dalian University of Technology (82232022, 82232043, DUT22LAB404)
License Information

Text and Data Mining valid from 2023-08-08

Version of Record valid from 2023-08-08
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Article History

Received: 29 April 2023

Revised: 20 July 2023

Accepted: 22 July 2023

First Online: 8 August 2023

Declarations

:

: The authors declare that they have no conflicts of interest.

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