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Enhancing Determinism in Atmosphere Plasma Nano-Scale Figuring through Calibration Incorporating Temperature Effects

Published Online: 2024-12-18

Published Print: 2024-12

Authors

Chen, Zhixian

Zhan, Zejin

Zhang, Junqi

Xiao, Yuxi

Deng, Hui https://orcid.org/0000-0002-7116-7188
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52375437)

National Natural Science Foundation of China (52035009)

Natural Science Foundation of Guangdong Province (2024B1515020027)

Natural Science Foundation of Guangdong Province (2023A1515011461)
License Information

Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-18
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Article History

Received: 23 September 2024

Revised: 8 November 2024

Accepted: 12 November 2024

First Online: 18 December 2024

Declarations

:

: The authors declare no conflicts of interest.

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