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Enhancing Determinism in Atmosphere Plasma Nano-Scale Figuring through Calibration Incorporating Temperature Effects

Published Online: 2024-12-18

Published Print: 2024-12

Authors

Chen, Zhixian

Zhan, Zejin

Zhang, Junqi

Xiao, Yuxi

Deng, Hui https://orcid.org/0000-0002-7116-7188
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52375437, 52035009)

Natural Science Foundation of Guangdong Province (2024B1515020027, 2023A1515011461)
License Information

Text and Data Mining valid from 2024-12-01

Version of Record valid from 2024-12-18
More Information

Article History

Received: 23 September 2024

Revised: 8 November 2024

Accepted: 12 November 2024

First Online: 18 December 2024

Declarations

:

: The authors declare no conflicts of interest.

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