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High-speed and High-accuracy Nanoprofile Reconstruction by Fusing Lateral Scanning Optical Interferometry and Deep Learning-driven Image Registration

Published Online: 2025-12-06

Published Print: 2025-12

Authors

Wu, Qizhe

Zhao, Hang

Li, Zedi

Wang, Jian

Zhu, Jinlong https://orcid.org/0000-0002-5723-2879
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (52175509, 52450158)

National Key Research and Development Program of China (2023YFF1500900)

Shenzhen Fundamental Research Program (JCYJ20220818100412027)

Guangdong-Hong Kong Technology Cooperation Funding Scheme Category C Platform (SGDX20230116093543005)

Huazhong University of Science and Technology (5019190003)
License Information

Text and Data Mining valid from 2025-12-01

Version of Record valid from 2025-12-06
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Article History

Received: 30 June 2025

Revised: 10 October 2025

Accepted: 14 October 2025

First Online: 6 December 2025

Declarations

:

: The authors declare that they have no conflicts of interest.

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