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Design and Development of a Palm-Sized Optical Head for On-Machine Calibration of Diffraction Scale Gratings

Published Online: 2026-04-28

Published Print: 2026-12

Authors

Tashiro, Naoya

Lim, Hyunsung

Shin, Dong Wook https://orcid.org/0009-0004-3745-015X
Shimizu, Yuki
Funding

Funding for this research was provided by:

Japan Science and Technology Agency (JPMJFR2027)

Japan Society for the Promotion of Science (25H00702)

Japan Society for the Promotion of Science (23K22641)

Japan Society for the Promotion of Science (23K17713)
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Text and Data Mining valid from 2026-04-28

Version of Record valid from 2026-04-28
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Article History

Received: 25 December 2025

Revised: 10 March 2026

Accepted: 11 March 2026

First Online: 28 April 2026

Declarations

:

: The authors declare that they have no conflicts of interest.

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