Crossmark

Design and Simulation of Microelectromechanical Systems (MEMS) for Ozone Gas Sensors

Crossref DOI link: https://doi.org/10.1007/s42341-018-0001-4

Published Online: 2018-01-29

Published Print: 2018-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Bedoui, Souhir

Gomri, Sami

Charfeddine Samet, Hekmet

Kachouri, Abdennaceur
License Information

Text and Data Mining valid from 2018-01-29
More Information

Article History

Received: 14 October 2016

Revised: 7 August 2017

Accepted: 23 August 2017

First Online: 29 January 2018