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High Performance Capacitive RF-MEMS Switch Based on HfO2 Dielectric

Crossref DOI link: https://doi.org/10.1007/s42341-018-0077-x

Published Online: 2018-10-25

Published Print: 2019-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Angira, Mahesh
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Text and Data Mining valid from 2018-10-25
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Article History

Received: 3 September 2018

Revised: 20 October 2018

Accepted: 23 October 2018

First Online: 25 October 2018