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Design of Single Cell Membrane Shape and Array Configuration for MEMS Based Micromachined Ultrasonic Sensor to Improve the Performance: A Three Dimensional Model Characterization

Crossref DOI link: https://doi.org/10.1007/s42341-021-00303-6

Published Online: 2021-03-26

Published Print: 2021-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Maity, Reshmi

Maity, N. P. https://orcid.org/0000-0002-1256-5856
Rao Karumuri, Srinivasa

Sravani, Girija

Guha, K.
License Information

Text and Data Mining valid from 2021-03-26

Version of Record valid from 2021-03-26
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Article History

Received: 30 June 2020

Revised: 20 February 2021

Accepted: 22 February 2021

First Online: 26 March 2021

Declarations

:

: There is no conflict of interest.

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