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Effect of Growth Induced Residual Stress in Epitaxial AlN thin film on SiC Substrate for MEMS Applications

Crossref DOI link: https://doi.org/10.1007/s42341-024-00580-x

Published Online: 2024-11-28

Published Print: 2025-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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