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Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method

Published Online: 2020-03-12

Published Print: 2020-12

Authors

Yu, Yongping

Chen, Lihui

Wang, Zhigang

Liu, Guoji
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (41972323, 51991362)

Jilin Provincial Department of Education (JJKH20190126KJ)

Guangzhou Marine Geological Survey (3S2180254424)
License Information

Text and Data Mining valid from 2020-03-12

Version of Record valid from 2020-03-12
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Article History

Received: 29 January 2020

Revised: 16 February 2020

Accepted: 21 February 2020

First Online: 12 March 2020

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