Investigation on Pull-in Voltage, Frequency Tuning and Frequency Stability of MEMS Devices Incorporating Casimir Force with Correction for Finite Conductivity
Crossref DOI link: https://doi.org/10.1007/s42417-020-00206-5
Published Online: 2020-03-11
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bhojawala, V. M. http://orcid.org/0000-0002-6876-3835
Vakharia, D. P.
Text and Data Mining valid from 2020-03-11
Version of Record valid from 2020-03-11
Article History
Received: 23 January 2020
Revised: 26 February 2020
Accepted: 28 February 2020
First Online: 11 March 2020