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Modal Analysis and Structural Optimization of MEMS Acoustic Emission Sensing Micro-elements with Variable Area for Improved Anti-interference Capability

Crossref DOI link: https://doi.org/10.1007/s42417-023-01067-4

Published Online: 2023-07-16

Published Print: 2024-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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