Silica Nano-particle Anneal Treatment and Its Effect on Chemical Mechanical Polishing
Crossref DOI link: https://doi.org/10.1007/s42835-018-00002-y
Published Online: 2019-01-10
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lu, Shibin
Wang, Haibo
Meng, Ying
Wang, Feifei
Fan, Min
Chen, Junning
Text and Data Mining valid from 2019-01-01
Article History
Received: 15 May 2018
Revised: 26 August 2018
Accepted: 1 October 2018
First Online: 10 January 2019