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A Simulation Study on Large-Area Inductively Coupled Plasma for Uniformity Optimization

Crossref DOI link: https://doi.org/10.1007/s42835-020-00497-4

Published Online: 2020-08-07

Published Print: 2020-09

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Son, Eui-Jeong https://orcid.org/0000-0002-3338-7323
Cho, Sung-Hwan

Lee, Ho-Jun
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Text and Data Mining valid from 2020-08-07

Version of Record valid from 2020-08-07
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Article History

Received: 17 May 2019

Revised: 8 June 2020

Accepted: 28 July 2020

First Online: 7 August 2020