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Development of a Thickness Meter for Conductive Thin Films Using Four-Point Probe Method

Crossref DOI link: https://doi.org/10.1007/s42835-021-00725-5

Published Online: 2021-03-29

Published Print: 2021-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kang, Jeon-Hong

Lee, Sang-Hwa

Ruh, Hyun

Yu, Kwang-Min https://orcid.org/0000-0001-5999-0772
License Information

Text and Data Mining valid from 2021-03-29

Version of Record valid from 2021-03-29
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Article History

Received: 10 December 2020

Revised: 19 February 2021

Accepted: 16 March 2021

First Online: 29 March 2021