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Development of an Automatic Precision Sheet Resistance Measurement System Using the Four-Point Probe Method

Published Online: 2025-03-10

Published Print: 2025-05

Authors

Kang, Jeon-Hong

Lee, Sang Hwa

Yu, Kwang Min

Joo, Sungjung https://orcid.org/0000-0002-8322-0177
Funding

Funding for this research was provided by:

Ministry of Trade, Industry and Energy (2002525)
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Text and Data Mining valid from 2025-03-10

Version of Record valid from 2025-03-10
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Article History

Received: 29 July 2024

Revised: 24 December 2024

Accepted: 21 January 2025

First Online: 10 March 2025

Declarations

:

: On behalf of all authors, the corresponding author states that there is no conflict of interest.

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