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Authors
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Funding
Funding for this research was provided by:
Bundesministerium für Wirtschaft und Energie (01MK20011A)
Fraunhofer-Institut für Integrierte Schaltungen IIS
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Article History
Received: 6 December 2022
Accepted: 22 August 2023
First Online: 9 September 2023
Declarations
:
: The authors declare no competing interests.
