Crossmark

Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods

Crossref DOI link: https://doi.org/10.1007/s44275-024-00002-3

Published Online: 2024-05-28

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Du, Kun

Ying, Jiafeng

Han, Lixin

Xue, Jie

Xin, Hanshen

Zhang, Jianhua

Li, Haoyuan
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (22090013)

Shanghai Committee of Science and Technology (21QA1402900, YDZX20213100002672)
License Information

Text and Data Mining valid from 2024-05-28

Version of Record valid from 2024-05-28
More Information

Article History

Received: 12 October 2023

Revised: 4 January 2024

Accepted: 22 January 2024

First Online: 28 May 2024

Declarations

:

: Not applicable.

: Jianhua Zhang is an Editorial Board Member.

Document is current

Any future updates will be listed below