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Authors
Yang, Xinyu
Lei, Yu https://orcid.org/0000-0003-4321-0385
Yu, Qiuyao
Wang, Qian
Chen, Houpeng
Song, Zhitang
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Funding
Funding for this research was provided by:
National Key R&D Program of China (2023YFB4404500, 2023YFB4502903, 2023YFB4502202, 2022ZD0117602)
National Natural Science Foundation of China (62274170, 92164302, 62204251, 62174168)
Youth Innovation Promotion Association of the Chinese Academy of Sciences (2022233)
Strategic Priority Research Program of the Chinese Academy of Sciences (XDB44010200, XDB06700300)
Science and Technology Council of Shanghai (23XD1404700, 23JC1400900, 22DZ2229009)
Autonomous deployment project of State Key Laboratory of Materials for Integrated Circuits (NKLJC-Z2023-B04)
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Article History
Received: 24 September 2024
Revised: 12 December 2024
Accepted: 22 December 2024
First Online: 15 January 2025
Declarations
:
: Not applicable.
: The authors have no competing financial interests to declare.
