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Control of scanning beam interference lithography by real-time compensation of scan angle error through acousto-optic modulation and phase-shift grating interferometry for large area nanostructuring

Crossref DOI link: https://doi.org/10.1007/s44374-025-00009-2

Published Online: 2026-01-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhou, Qi

Oh, Jongeun

Kim, Donghyun

Suryani, Ika Oktavia

Han, Runjia

Kang, Shinill
Funding

Funding for this research was provided by:

National Research Foundation of Korea (2015R1A5A1037668)

National Research Foundation of Korea (2015R1A5A1037668)

National Research Foundation of Korea (2015R1A5A1037668)

National Research Foundation of Korea (2015R1A5A1037668)

National Research Foundation of Korea (2015R1A5A1037668)

National Research Foundation of Korea (2015R1A5A1037668)
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Text and Data Mining valid from 2026-01-05

Version of Record valid from 2026-01-05
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Article History

Received: 11 March 2025

Accepted: 12 December 2025

First Online: 5 January 2026

Declarations

:

: The authors declare no competing interests.

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