Resonant Silicon Microcantilevers for Particle and Gas Sensing
Crossref DOI link: https://doi.org/10.1007/5346_2023_33
Published Online: 2023-11-22
Published Print: 2023
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Jiushuai
Peiner, Erwin
Text and Data Mining valid from 2023-01-01
Version of Record valid from 2023-01-01
Chapter History
First Online: 22 November 2023