Disturbance Rejection Run-to-Run Controller for Semiconductor Manufacturing
Crossref DOI link: https://doi.org/10.1007/978-3-030-25446-9_13
Published Online: 2019-09-21
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Khakifirooz, Marzieh
Fathi, Mahdi
Pardalos, Panos M.
Text and Data Mining valid from 2019-01-01
Chapter History
First Online: 21 September 2019