Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing
Crossref DOI link: https://doi.org/10.1007/978-3-030-79749-2_2
Published Online: 2021-10-13
Published Print: 2022
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Jiushuai
Peiner, Erwin
Text and Data Mining valid from 2021-10-13
Version of Record valid from 2021-10-13
Chapter History
First Online: 13 October 2021