Post Processed Foundry MEMS Actuators for Large Deflection Optical Scanning
Crossref DOI link: https://doi.org/10.1007/978-3-319-95062-4_13
Published Online: 2018-10-02
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Starman, La Vern
Torres, D.
Hall, H. J.
Walton, J. P.
Lake, R. A.
Text and Data Mining valid from 2018-10-02