Electrostatic MEMS Switch with Vertical Beams and Body Biasing
Crossref DOI link: https://doi.org/10.1007/978-981-10-8672-4_78
Published Online: 2018-07-26
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bahmanyaran, Armin
Jafari, Kian
License valid from 2018-07-26
Text and Data Mining valid from 2018-07-26
Chapter History
First Online: 26 July 2018