Study of 3D Hexagonal Membrane Structure for MEMS-Based Ultrasonic Transducer Using Finite Element Method
Crossref DOI link: https://doi.org/10.1007/978-981-15-3631-1_19
Published Online: 2020-06-02
Published Print: 2020
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Maity, Reshmi
Maity, N. P.
Guha, K.
Srinivasa Rao, K.
Girija Sravani, K.
Baishya, S.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Chapter History
First Online: 2 June 2020