Characterization of Hydrogen-Free and Hydrogenated DLC Films
Crossref DOI link: https://doi.org/10.1007/978-981-15-7610-2_3
Published Online: 2020-10-13
Published Print: 2021
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Harigai, Toru
Imai, Takahiro
Takikawa, Hirofumi
Kaneko, Satoru
Kunitsugu, Shinsuke
Niibe, Masahito
Kanda, Kazuhiro
Kamiya, Masao
Text and Data Mining valid from 2020-10-13
Version of Record valid from 2020-10-13
Chapter History
First Online: 13 October 2020