Cui, Xiaole
Ma, Xiao
Lin, Qiujun
Li, Xiang
Zhou, Hang
Cui, Xiaoxin http://orcid.org/0000-0002-0394-8839
Funding for this research was provided by:
National Natural Science Foundation of China (U1613215)
Shenzhen Science and Technology Innovation Committe (JCYJ20170412150411676)
TSV 3D Integrated Micro/Nano system Lab (ZDSYS201802061805105)
Article History
Received: 22 March 2019
Revised: 27 October 2019
Accepted: 29 October 2019
First Online: 11 November 2019