Giannini, Daniele
Braghin, Francesco
Aage, Niels
Funding for this research was provided by:
STMicroelectronics (081/16CR)
Villum Foundation (InnoTop VILLUM Investigator project)
Article History
Received: 29 December 2019
Revised: 27 February 2020
Accepted: 30 March 2020
First Online: 12 June 2020
Compliance with ethical standards
:
: Francesco Braghin and Daniele Giannini received research grants from the commercial company STMicroelectronics, active in the MEMS field.