Principles and applications of trans-wafer processing using a 2-μm thulium fiber laser
Crossref DOI link: https://doi.org/10.1007/s00170-015-7870-z
Published Online: 2015-10-03
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mingareev, Ilya
Gehlich, Nils
Bonhoff, Tobias
Abdulfattah, Ali
Sincore, Alex M.
Kadwani, Pankaj
Shah, Lawrence
Richardson, Martin
Text and Data Mining valid from 2015-10-03