Development of a capacity analysis and planning simulation model for semiconductor fabrication
Crossref DOI link: https://doi.org/10.1007/s00170-016-9089-z
Published Online: 2016-07-25
Published Print: 2018-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Li-Chih
Wang, Allen
Chueh, Chun-Ya
Funding for this research was provided by:
Minister of Science & Technology, Taiwan, R.O.C. (NSC 101-2221-E-029-008-MY3.)
Text and Data Mining valid from 2016-07-25