Chemical mechanical polishing of the narrow channel of a channel-cut crystal
Crossref DOI link: https://doi.org/10.1007/s00170-020-05443-2
Published Online: 2020-05-30
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Kun http://orcid.org/0000-0001-6543-5484
Li, Wenhao
Qu, Qintao
Wang, Zhanshan
Funding for this research was provided by:
National Natural Science Foundation of China (51875413, 51105279)
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 3 September 2019
Accepted: 8 May 2020
First Online: 30 May 2020