Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization
Crossref DOI link: https://doi.org/10.1007/s00170-020-06165-1
Published Online: 2020-10-19
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Jia http://orcid.org/0000-0003-0549-011X
Zheng, Jingyi
Rao, Prahalada
Kong, Zhenyu
Text and Data Mining valid from 2020-10-19
Version of Record valid from 2020-10-19
Article History
Received: 8 June 2020
Accepted: 24 September 2020
First Online: 19 October 2020