Mapping of local argon impingement on a virtual surface: an insight for gas injection during FEBID
Crossref DOI link: https://doi.org/10.1007/s00339-014-8755-y
Published Online: 2014-11-05
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wanzenboeck, H. D.
Hochleitner, G.
Mika, J.
Shawrav, M. M.
Gavagnin, M.
Bertagnolli, E.
License valid from 2014-11-05