Numerical and experimental study of nanolithography using nanoscale C-shaped aperture
Crossref DOI link: https://doi.org/10.1007/s00339-015-9080-9
Published Online: 2015-03-04
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ding, Li
Wang, Liang
Text and Data Mining valid from 2015-03-04