Nanoimprint lithography: 2D or not 2D? A review
Crossref DOI link: https://doi.org/10.1007/s00339-015-9106-3
Published Online: 2015-04-01
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Schift, Helmut
Text and Data Mining valid from 2015-04-01