Crystal structure of laser-induced subsurface modifications in Si
Crossref DOI link: https://doi.org/10.1007/s00339-015-9238-5
Published Online: 2015-06-04
Published Print: 2015-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Verburg, P. C.
Smillie, L. A.
Römer, G. R. B. E.
Haberl, B.
Bradby, J. E.
Williams, J. S.
Huis in ’t Veld, A. J.
License valid from 2015-06-04