Line width tuning and smoothening for periodical grating fabrication in nanoimprint lithography
Crossref DOI link: https://doi.org/10.1007/s00339-015-9278-x
Published Online: 2015-06-11
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yao, Yuhan
Wang, Yifei
Liu, He
Li, Yuanrui
Song, Boxiang
Wu, Wei
Text and Data Mining valid from 2015-06-11