Single-layer versus two-layer stamps for reduced pressure thermal nanoimprint
Crossref DOI link: https://doi.org/10.1007/s00339-015-9301-2
Published Online: 2015-06-25
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Papenheim, Marc
Dhima, Khalid
Wang, Si
Steinberg, Christian
Scheer, Hella-Christin
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft
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