Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality
Crossref DOI link: https://doi.org/10.1007/s00339-015-9352-4
Published Online: 2015-07-23
Published Print: 2015-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Schille, Joerg
Schneider, Lutz
Loeschner, Udo
Funding for this research was provided by:
Bundesministerium für Bildung und Forschung (03IPT506X/03FH037PX4)
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