Micro-cutting of silicon implanted with hydrogen and post-implantation thermal treatment
Crossref DOI link: https://doi.org/10.1007/s00339-016-0227-0
Published Online: 2016-07-01
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jelenković, Emil V.
To, Suet
Sundaravel, B.
Xiao, Gaobo
Huang, Hu
License valid from 2016-07-01