Defect tracking for nanoimprint lithography using optical surface scanner and scanning electron microscope
Crossref DOI link: https://doi.org/10.1007/s00339-016-0384-1
Published Online: 2016-08-25
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yu, Zhaoning http://orcid.org/0000-0001-7860-1365
Kurataka, Nobuo
Tran, Hieu
Gauzner, Gene
License valid from 2016-08-25