Investigation of mechanical properties of CVD grown titanium silicon nitride thin films under reduced atmosphere
Crossref DOI link: https://doi.org/10.1007/s00339-017-1455-7
Published Online: 2017-12-11
Published Print: 2018-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Guha, Spandan
Das, Soham
Bandyopadhyay, Asish
Das, Santanu
Swain, Bibhu P.
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